Invention Grant
- Patent Title: Method for producing one-time-programmable memory cells and corresponding integrated circuit
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Application No.: US15413497Application Date: 2017-01-24
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Publication No.: US09881928B2Publication Date: 2018-01-30
- Inventor: Stéphane Denorme , Philippe Candelier
- Applicant: STMicroelectronics SA
- Applicant Address: FR Montrouge
- Assignee: STMICROELECTRONICS SA
- Current Assignee: STMICROELECTRONICS SA
- Current Assignee Address: FR Montrouge
- Agency: Slater Matsil, LLP
- Priority: FR1554457 20150519
- Main IPC: H01L27/112
- IPC: H01L27/112 ; H01L21/84 ; H01L23/525 ; H01L27/12 ; H01L21/28 ; H01L29/40 ; H01L29/49 ; H01L29/66 ; H01L21/762 ; H01L29/06 ; H01L21/8234 ; H01L27/06

Abstract:
An integrated circuit includes a silicon-on-insulator substrate that includes a semiconductor film located above a buried insulating layer. A first electrode of a silicide material overlies the semiconductor film. A sidewall insulating material is disposed along sidewalls of the first electrode. A dielectric layer is located between the first electrode and the semiconductor film. A second electrode includes a silicided zone of the semiconductor film, which is located alongside the sidewall insulating material and extends at least partially under the dielectric layer and the first electrode. The first electrode, the dielectric layer and the second electrode form a capacitor that is part of a circuit of the integrated circuit.
Public/Granted literature
- US20170133390A1 METHOD FOR PRODUCING ONE-TIME-PROGRAMMABLE MEMORY CELLS AND CORRESPONDING INTEGRATED CIRCUIT Public/Granted day:2017-05-11
Information query
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