Invention Grant
- Patent Title: Transistors, semiconductor devices, and electronic devices including transistor gates with conductive elements including cobalt silicide
-
Application No.: US14182794Application Date: 2014-02-18
-
Publication No.: US09882015B2Publication Date: 2018-01-30
- Inventor: Yongjun Jeff Hu
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: TraskBritt
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L29/49 ; H01L21/28 ; H01L27/105 ; H01L27/115 ; H01L27/11521 ; H01L27/108

Abstract:
A method for fabricating a transistor gate with a conductive element that includes cobalt silicide includes use of a sacrificial material as a place-holder between sidewall spacers of the transistor gate until after high temperature processes, such as the fabrication of raised source and drain regions, have been completed. In addition, semiconductor devices (e.g., DRAM devices and NAND flash memory devices) with transistor gates that include cobalt silicide in their conductive elements are also disclosed, as are transistors with raised source and drain regions and cobalt silicide in the transistor gates thereof. Intermediate semiconductor device structures that include transistor gates with sacrificial material or a gap between upper portions of sidewall spacers are also disclosed.
Public/Granted literature
Information query
IPC分类: