Invention Grant
- Patent Title: Spray assembly and wet etching device having the same
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Application No.: US14781137Application Date: 2015-07-08
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Publication No.: US09892940B2Publication Date: 2018-02-13
- Inventor: Jia Li
- Applicant: Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Applicant Address: CN Shenzhen, Guangdong
- Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Current Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Current Assignee Address: CN Shenzhen, Guangdong
- Agency: Mintz Levin Cohn Ferris Glovsky and Popeo, P.C.
- Agent Kongsik Kim
- Priority: CN201510368699 20150629
- International Application: PCT/CN2015/083503 WO 20150708
- International Announcement: WO2017/000320 WO 20170105
- Main IPC: B05B1/20
- IPC: B05B1/20 ; H01L21/67 ; B05B13/02 ; B05B15/08

Abstract:
A spray assembly including a spray pipe with a bottom provided with a plurality of first through holes, each having a nozzle, wherein the nozzle includes a slider with an area larger than the first through hole, to cover the first through hole. The nozzle is connected to the slider and protrudes from the first through hole; the nozzle also includes a locking member to connect the slider to the spray pipe. The slider can move to adjust the position of the nozzle in the first through hole. There also provides a wet etching device including a spray unit, wherein the spray unit includes a plurality of spray assemblies as mentioned above, and a plurality of spray pipes in the plurality of spray assemblies are arranged in parallel with each other or approximately in parallel with each other.
Public/Granted literature
- US20170140950A1 SPRAY ASSEMBLY AND WET ETCHING DEVICE HAVING THE SAME Public/Granted day:2017-05-18
Information query
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