- 专利标题: Multi-zone resistive heater
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申请号: US12485160申请日: 2009-06-16
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公开(公告)号: US09892941B2公开(公告)日: 2018-02-13
- 发明人: Anqing Cui , Binh Tran , Alexander Tam , Jacob W. Smith , R. Suryanarayanan Iyer , Joseph Yudovsky , Sean M. Seutter
- 申请人: Anqing Cui , Binh Tran , Alexander Tam , Jacob W. Smith , R. Suryanarayanan Iyer , Joseph Yudovsky , Sean M. Seutter
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Servilla Whitney LLC
- 主分类号: H05B3/68
- IPC分类号: H05B3/68 ; H01L21/67
摘要:
Apparatus, reactors, and methods for heating substrates are disclosed. The apparatus comprises a stage comprising a body and a surface having an area to support a substrate, a shaft coupled to the stage, a first heating element disposed within a central region of the body of the stage, and at least second and third heating elements disposed within the body of the stage, the at least second and third heating elements each partially surrounding the first heating element and wherein the at least second and third heating elements are circumferentially adjacent to each other.
公开/授权文献
- US20090314762A1 Multi-Zone Resistive Heater 公开/授权日:2009-12-24