Invention Grant
- Patent Title: Non-volatile memory device having vertical structure and method of manufacturing the same
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Application No.: US15189205Application Date: 2016-06-22
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Publication No.: US09899408B2Publication Date: 2018-02-20
- Inventor: Young-Hwan Son , Young-Woo Park , Jae-Duk Lee
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si, Gyeonggi-Do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si, Gyeonggi-Do
- Agency: F. Chau & Assocoates, LLC
- Priority: KR10-2015-0120543 20150826
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/1157

Abstract:
A non-volatile memory device having a vertical structure includes: a first interlayer insulating layer on a substrate; a first gate electrode disposed on the first interlayer insulating layer; second interlayer insulating layers and second gate electrodes alternately stacked on the first gate electrode; an opening portion penetrating the first gate electrode, the second interlayer insulating layers, and the second gate electrodes and exposing the first interlayer insulating layer; a gate dielectric layer covering side walls and a bottom surface of the opening portion; and a channel region formed on the gate dielectric layer, and penetrating a bottom surface of the gate dielectric layer and the first interlayer insulating layer and thus electrically connected to the substrate, wherein a separation distance between side walls of the gate dielectric layer in a region which contacts the first gate electrode is greater than that in a region which contacts any one of the second gate electrodes.
Public/Granted literature
- US20170062468A1 NON-VOLATILE MEMORY DEVICE HAVING VERTICAL STRUCTURE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2017-03-02
Information query
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