Invention Grant
- Patent Title: Displacement detecting device
-
Application No.: US15220487Application Date: 2016-07-27
-
Publication No.: US09903742B2Publication Date: 2018-02-27
- Inventor: Akihide Kimura
- Applicant: MITUTOYO CORPORATION
- Applicant Address: JP Kawasaki-shi
- Assignee: MITUTOYO CORPORATION
- Current Assignee: MITUTOYO CORPORATION
- Current Assignee Address: JP Kawasaki-shi
- Agency: Rankin, Hill & Clark LLP
- Priority: JP2015-148382 20150728
- Main IPC: G01D5/34
- IPC: G01D5/34 ; G01D5/26 ; G01D5/38

Abstract:
A displacement detecting device includes a main scale and a detecting head unit. The detecting head unit includes a light source, a light receiving unit, and an index scale group that is disposed in the middle of a light path from the main scale to the light receiving unit. The index scale group includes two or more index scales including diffraction gratings, respectively. A positive s-th order diffracted light and a negative s-th order diffracted light of diffracted lights from the main scale are used as the signal lights. The displacement detecting device satisfies a first condition and a second condition, the first condition being expressed as follows: λ×(u1−u2)×(mN÷g)=2×sin α, the second condition being expressed as follows: λ×u1×(mN÷g)−sin α≠λ÷g×Σi=1N (ti×mi).
Public/Granted literature
- US20170030745A1 DISPLACEMENT DETECTING DEVICE Public/Granted day:2017-02-02
Information query
IPC分类: