Invention Grant
- Patent Title: System and method for patch based inspection
-
Application No.: US14964527Application Date: 2015-12-09
-
Publication No.: US09904995B2Publication Date: 2018-02-27
- Inventor: Leonid Karlinsky , Moshe Rosenweig , Boaz Cohen
- Applicant: Applied Materials Israel Ltd.
- Applicant Address: IL Rehovot
- Assignee: APPLIED MATERIALS ISRAEL, LTD.
- Current Assignee: APPLIED MATERIALS ISRAEL, LTD.
- Current Assignee Address: IL Rehovot
- Agency: Lowenstein Sandler LLP
- Main IPC: G06K9/00
- IPC: G06K9/00 ; G06T7/00 ; G06T5/00 ; G06K9/62

Abstract:
An inspection system that may include a processor and a memory module; wherein the memory module is configured to store a first image of an area of an object and a second image of the area of the object; wherein the processor is configured to generate a synthetic image of the area of the object, and to compare the synthetic image to the second image to provide defect detection results.
Public/Granted literature
- US20170169554A1 SYSTEM AND METHOD FOR PATCH BASED INSPECTION Public/Granted day:2017-06-15
Information query