- Patent Title: Method for manufacturing TFT, array substrate and display device
-
Application No.: US15221222Application Date: 2016-07-27
-
Publication No.: US09905592B2Publication Date: 2018-02-27
- Inventor: Tongshang Su , Shengping Du , Ning Liu , Dongfang Wang , Guangcai Yuan
- Applicant: BOE Technology Group Co., Ltd.
- Applicant Address: CN Beijing
- Assignee: BOE Technology Group Co., Ltd.
- Current Assignee: BOE Technology Group Co., Ltd.
- Current Assignee Address: CN Beijing
- Agency: Banner & Witcoff, Ltd.
- Priority: CN201610073575 20160202
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/66

Abstract:
A method for manufacturing a thin-film transistor (TFT), an array substrate and a display device are disclosed. The manufacturing method includes: forming a photoresist layer provided with a completely retained region, a partially-retained region and a completely removed region on a metal film by a half-tone mask process; forming a source/drain metal layer by etching the metal film under the cover of the photoresist layer; removing the photoresist layer in the partially-retained region; forming an active layer by patterning the semiconductor film; and removing residual photoresist layer.
Public/Granted literature
- US20170221924A1 Method for Manufacturing TFT, Array Substrate and Display Device Public/Granted day:2017-08-03
Information query
IPC分类: