Invention Grant
- Patent Title: Sensor array chip with piezoelectric transducer including inkjet forming method
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Application No.: US14252222Application Date: 2014-04-14
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Publication No.: US09910015B2Publication Date: 2018-03-06
- Inventor: Stuart M. Jacobsen
- Applicant: Texas Instruments Incorporated
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Tuenlap D. Chan; Charles A. Brill; Frank D. Cimino
- Main IPC: G01N29/036
- IPC: G01N29/036 ; G01N33/487 ; G01N29/24 ; G01N29/02

Abstract:
A method of forming a functionalized sensor array includes providing a substrate having at least one sensor array chip including a plurality of sensor structures. The sensor structures include a piezoelectric layer interposed between upper and lower electrodes and positioned across an area of the sensor array chip in a spatial arrangement. An inkjet cartridge chip is also provided having a plurality of microfluidic channels including a fill side having a plurality of fill side orifices and a dispense side having a plurality of dispense nozzles, wherein two or more of the plurality of microchannels are loaded with different sensing materials, and wherein locations of the plurality of dispense nozzles are matched to the spatial arrangement. The plurality of dispense nozzles are aligned to the plurality of sensor structures, and the plurality of dispense nozzles are actuated to deposit the different sensing materials on the plurality of sensor structures.
Public/Granted literature
- US20150293060A1 SENSOR ARRAY CHIP WITH PIEZOELECTRIC TRANSDUCER INCLUDING INKJET FORMING METHOD Public/Granted day:2015-10-15
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