- 专利标题: Photo electric converter imaging system and method for manufacturing photoelectric converter
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申请号: US15191342申请日: 2016-06-23
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公开(公告)号: US09917140B2公开(公告)日: 2018-03-13
- 发明人: Nobuhiko Sato
- 申请人: CANON KABUSHIKI KAISHA
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Canon U.S.A., Inc. IP Division
- 优先权: JP2014-163208 20140808
- 主分类号: H01L27/30
- IPC分类号: H01L27/30 ; H04N5/335 ; H01L51/44 ; H01L27/146
摘要:
A method for manufacturing a photoelectric converter includes a first step of preparing a semiconductor substrate including a metal oxide semiconductor (MOS) transistor, a second step of forming a plurality of interlayer insulating films above the semiconductor substrate, and a third step of forming a photoelectric conversion portion above the semiconductor substrate. The second step includes a step of forming a first film containing hydrogen. The third step includes a step of forming a first electrode, a step of forming a photoelectric conversion film, and a step of forming a second electrode. The method includes a step of performing heat treatment between the step of forming the first film and the step of forming the photoelectric conversion film.
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