Invention Grant
- Patent Title: Scanning probe microscope and measurement range adjusting method for scanning probe microscope
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Application No.: US15086560Application Date: 2016-03-31
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Publication No.: US09921241B2Publication Date: 2018-03-20
- Inventor: Masatsugu Shigeno , Yoshiteru Shikakura
- Applicant: Hitachi High-Tech Science Corporation
- Applicant Address: JP Minato-ku, Tokyo
- Assignee: Hitachi High-Tech Science Corporation
- Current Assignee: Hitachi High-Tech Science Corporation
- Current Assignee Address: JP Minato-ku, Tokyo
- Agency: Banner & Witcoff, Ltd.
- Priority: JP2015-072728 20150331; JP2016-058655 20160323
- Main IPC: G01Q30/06
- IPC: G01Q30/06

Abstract:
A scanning probe microscope has a cantilever having: a probe that is to be contacted or approached on a surface of a sample; and a processor that operates to perform a process including: calculating a measurement width MW and an offset value OV from a minimum value Smin and a maximum value Smax of a signal indicating a displacement of the cantilever with the following Equations (1) and (2) when a prescanning operation is performed before the measurement data is acquired by the probe microscope controller; and adjusting at least one of the offset value OV and the measurement width MW based on a temporal variation of the signal at the same position on the surface of the sample when the prescanning operation is performed. MW=(Smax−Smin) Equation (1) OV=(MW/2)+Smin Equation (2)
Public/Granted literature
- US20160291053A1 Scanning Probe Microscope and Measurement Range Adjusting Method for Scanning Probe Microscope Public/Granted day:2016-10-06
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