- Patent Title: Interference objective lens and light interference measuring device
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Application No.: US14985496Application Date: 2015-12-31
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Publication No.: US09921391B2Publication Date: 2018-03-20
- Inventor: Ken Motohashi
- Applicant: Mitutoyo Corporation
- Applicant Address: JP Kawasaki
- Assignee: MITUTOYO CORPORATION
- Current Assignee: MITUTOYO CORPORATION
- Current Assignee Address: JP Kawasaki
- Agency: Rankin, Hill & Clark LLP
- Priority: JP2015-000032 20150105
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G02B7/182 ; G02B26/00 ; G01B11/24

Abstract:
An interference objective lens includes: an objective lens system; a beam splitter which is placed between a measurement surface of a measuring object and a tip end of the objective lens, which diverges light emitted from the objective lens into a reference optical path and a measurement optical path, and which outputs combined wave in which reflection light passing through the reference optical path and reflection light passing through the measuring object are combined; a reference mirror which is placed in the reference optical path and which reflects, by the beam splitter, light diverged into the reference optical path; a mirror holding member which has a spherical surface-shaped outer surface, and which holds the reference mirror such that a reflection surface of the reference mirror passes through a center of a spherical surface; a support member which has a spherical surface-shaped inner surface having a diameter which is substantially equal to the outer surface of the mirror holding member, and which supports the outer surface of the mirror holding member by the inner surface; and a reference mirror adjusting mechanism which adjusts a position of the mirror holding member in the support member.
Public/Granted literature
- US20160195384A1 INTERFERENCE OBJECTIVE LENS AND LIGHT INTERFERENCE MEASURING DEVICE Public/Granted day:2016-07-07
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