- 专利标题: Antifuse element using spacer breakdown
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申请号: US15117621申请日: 2014-03-24
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公开(公告)号: US09929090B2公开(公告)日: 2018-03-27
- 发明人: Ting Chang , Chia-Hong Jan , Walid M. Hafez
- 申请人: INTEL CORPORATION
- 申请人地址: US CA Santa Clara
- 专利权人: INTEL CORPORATION
- 当前专利权人: INTEL CORPORATION
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Finch & Maloney PLLC
- 国际申请: PCT/US2014/031592 WO 20140324
- 国际公布: WO2015/147782 WO 20151001
- 主分类号: H01L23/52
- IPC分类号: H01L23/52 ; H01L23/525 ; H01L23/62 ; G11C17/14 ; G11C17/16 ; H01L27/112 ; H01L27/102
摘要:
Techniques and circuitry are disclosed for efficiently implementing programmable memory array circuit architectures, including both non-volatile and volatile memories. The memory circuitry employs an antifuse scheme that includes an array of 1 T bitcells, wherein each bitcell effectively contains one gate or transistor-like device that provides both an antifuse element and a selector device for that bitcell. In particular, the bitcell device has asymmetric trench-based source/drain contacts such that one contact forms a capacitor in conjunction with the spacer and gate metal, and the other contact forms a diode in conjunction with a doped diffusion area and the gate metal. The capacitor serves as the antifuse element of the bitcell, and can be programmed by breaking down the spacer. The diode effectively provides a Schottky junction that serves as a selector device which can eliminate program and read disturbs from bitcells sharing the same bitline/wordline.
公开/授权文献
- US20160351498A1 ANTIFUSE ELEMENT USING SPACER BREAKDOWN 公开/授权日:2016-12-01
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