Invention Grant
- Patent Title: Apparatus and method for analyzing defects by using heat distribution measurement
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Application No.: US14647772Application Date: 2013-11-26
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Publication No.: US09933376B2Publication Date: 2018-04-03
- Inventor: Ki Soo Chang , Seon Young Ryu , Woo June Choi , Geon Hee Kim
- Applicant: Korea Basic Science Institute
- Applicant Address: KR Daejeon
- Assignee: Korea Basic Science Institute
- Current Assignee: Korea Basic Science Institute
- Current Assignee Address: KR Daejeon
- Agency: Osha Liang LLP
- Priority: KR10-2012-0135492 20121127
- International Application: PCT/KR2013/010797 WO 20131126
- International Announcement: WO2014/084574 WO 20140605
- Main IPC: G01N25/72
- IPC: G01N25/72 ; H01L21/66

Abstract:
The present invention provides a method for analyzing defects by using heat distribution measurement, comprising: a sample loading unit for loading a sample to check whether or not there is a defect through heat distribution characteristics; a light source for radiating visible light onto the sample; a power supply unit for generating a driving signal in order to periodically heat the sample; a detection unit for detecting reflected light from the surface of the sample; and a signal generator for synchronizing the detection unit with the driving signal of the power supply unit.
Public/Granted literature
- US20150316496A1 DEVICE AND METHOD FOR ANALYZING DEFECTS BY USING HEAT DISTRIBUTION MEASUREMENT Public/Granted day:2015-11-05
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