Fluorinated siloxane compositions, and methods of making and using the fluorinated siloxanes are disclosed. The polymers described herein may exhibit self-healing properties, a low dielectric constant, and a low refractive index. In some embodiments, a method of making a siloxane compound may involve contacting a silicon metal with a fluorinated compound to form a dichlorosilane compound, hydrolyzing the dichlorosilane compound to form a fluorinated tetrasiloxane compound, and contacting the fluorinated tetrasiloxane compound with a metal catalyst to form a fluorinated cyclic siloxane (D4) compound.