A substrate including a light-emitting element and a terminal for connection to the outside is prepared. The light-emitting element includes a light-emitting layer, an anode, and a cathode. The anode and the cathode interpose the light-emitting layer therebetween. A sealing layer is formed on the substrate so as to cover the light-emitting element and the terminal. An amorphous carbon film is formed on the sealing layer so as to cover a region above the light-emitting element and avoid a region above the terminal. The sealing layer is dry-etched so as to expose the terminal from the sealing layer using the amorphous carbon film as a mask. The amorphous carbon film is removed.