Invention Grant
- Patent Title: X-ray apparatus and structure manufacturing method
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Application No.: US14668029Application Date: 2015-03-25
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Publication No.: US09953799B2Publication Date: 2018-04-24
- Inventor: Fumihiko Hakoda , Satoshi Takahashi , Jim Smith
- Applicant: NIKON CORPORATION , NIKON METROLOGY NV
- Applicant Address: JP Tokyo BE Leuven
- Assignee: NIKON CORPORATION,NIKON METROLOGY NV
- Current Assignee: NIKON CORPORATION,NIKON METROLOGY NV
- Current Assignee Address: JP Tokyo BE Leuven
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
- Priority: JP2012-212986 20120926; JP2013-100141 20130510
- Main IPC: H01J35/16
- IPC: H01J35/16 ; G01N23/04 ; H01J35/04 ; B22D46/00 ; G21K7/00 ; H05G1/02 ; G01N23/02 ; H01J9/42
Abstract:
Provided is an X-ray apparatus including: a target configured to generate an X-ray by collision of electrons or transmission of electrons; a filament configured to release the electrons to the target; a housing that has the filament therein; and a first holding member configured to hold a portion of the target disposed on an outer side of the housing on the outer side of the housing.
Public/Granted literature
- US20150294832A1 X-RAY APPARATUS AND STRUCTURE MANUFACTURING METHOD Public/Granted day:2015-10-15
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