Invention Grant
- Patent Title: Thin film transistor and manufacturing method thereof, display device
-
Application No.: US14913581Application Date: 2015-07-28
-
Publication No.: US09954070B2Publication Date: 2018-04-24
- Inventor: Longyan Wang , Yongqian Li , Kun Cao , Quanhu Li , Jingwen Yin , Baoxia Zhang , Cuili Gai , Zhongyuan Wu , Gang Wang
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE Technology Group Co., Ltd.
- Current Assignee: BOE Technology Group Co., Ltd.
- Current Assignee Address: CN Beijing
- Agency: Collard & Roe, P.C.
- Priority: CN201510134375 20150325
- International Application: PCT/CN2015/085302 WO 20150728
- International Announcement: WO2016/150056 WO 20160929
- Main IPC: H01L29/10
- IPC: H01L29/10 ; H01L29/04 ; H01L29/45 ; H01L29/786 ; H01L21/285 ; H01L21/3213 ; H01L21/443 ; H01L21/4763 ; H01L29/20 ; H01L29/22 ; H01L29/24 ; H01L29/423 ; H01L29/66

Abstract:
A thin film transistor, a manufacturing method thereof, and a display device are provided. The thin film transistor includes a gate electrode (21), an active layer (23), a source electrode (241) and a drain electrode (242). The source electrode (241) and the drain electrode (242) are formed of at least two materials, the forming materials of the source electrode (241) and the drain electrode (242) can create a cell reaction in a corresponding etching solution so as to be etched, and material of the active layer (23) is not corroded by the etching solution. With the thin film transistor and manufacturing method thereof according to embodiments of the invention, a problem that an active layer is liable to be corroded in an etching procedure of a source electrode and a drain electrode can be solved, and thus the thin film transistor device can be manufactured by using a back channel etch process. Consequently, the process number for manufacture of the thin film transistor is decreased, and the manufacturing cost is saved.
Public/Granted literature
- US20170033192A1 THIN FILM TRANSISTOR AND MANUFACTURING METHOD THEREOF, DISPLAY DEVICE Public/Granted day:2017-02-02
Information query
IPC分类: