Invention Grant
- Patent Title: Correction device and correction method for optical measuring apparatus
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Application No.: US14668171Application Date: 2015-03-25
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Publication No.: US09958263B2Publication Date: 2018-05-01
- Inventor: Ryoichi Imaizumi , Ichiro Taniguchi
- Applicant: MITUTOYO CORPORATION
- Applicant Address: JP Kanagawa
- Assignee: MITUTOYO CORPORATION
- Current Assignee: MITUTOYO CORPORATION
- Current Assignee Address: JP Kanagawa
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JP2014-068612 20140328
- Main IPC: G01B11/08
- IPC: G01B11/08 ; G01B11/24 ; G01B11/25

Abstract:
A correction device for an optical measuring apparatus obtains correction data for each scanning position of a light beam from an optical measuring apparatus that includes a light beam scanner which scans with a light beam a measuring region where a measured object is placed, and a light receiver which receives a transmitted light beam from the measuring region. The correction device includes a translucent scale having scale marks arranged at a predetermined pitch, and a support to mount the scale in the measuring region so that an arrangement direction of the scale marks is a scanning direction of the light beam.
Public/Granted literature
- US20150276390A1 CORRECTION DEVICE AND CORRECTION METHOD FOR OPTICAL MEASURING APPARATUS Public/Granted day:2015-10-01
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