- 专利标题: Pressure sensor package with stress isolation features
-
申请号: US14716515申请日: 2015-05-19
-
公开(公告)号: US09963341B2公开(公告)日: 2018-05-08
- 发明人: David P. Potasek , Robert Stuelke
- 申请人: Rosemount Aerospace Inc.
- 申请人地址: US MN Burnsville
- 专利权人: Rosemount Aerospace, Inc.
- 当前专利权人: Rosemount Aerospace, Inc.
- 当前专利权人地址: US MN Burnsville
- 代理机构: Kinney & Lange, P.A.
- 主分类号: B81B7/00
- IPC分类号: B81B7/00
摘要:
A sensor package includes a manifold and a MEMS die. The manifold includes a cylindrical body, a flange, and a mounting surface. The cylindrical body defines a first passage that extends longitudinally along a central axis from a first exterior end to an interior end of the cylindrical body. The flange extends from the cylindrical body and has an outer periphery that is configured to support a print circuit board. The mounting surface is disposed at the interior end of the first passage. The surface area of the mounting surface is less than the surface area of a MEMS die configured to mate with the mounting surface.
公开/授权文献
- US20160340176A1 PRESSURE SENSOR PACKAGE WITH STRESS ISOLATION FEATURES 公开/授权日:2016-11-24
信息查询