Invention Grant
- Patent Title: Surface measurement device and method thereof
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Application No.: US15249298Application Date: 2016-08-26
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Publication No.: US09970754B2Publication Date: 2018-05-15
- Inventor: Chia-Hung Cho , Kai-Ping Chuang , Yi-Wei Chang
- Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Applicant Address: TW Hsinchu
- Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Current Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Current Assignee Address: TW Hsinchu
- Agency: Maschoff Brennan
- Priority: TW104127948A 20150826; TW105126442A 20160818
- Main IPC: G01B11/30
- IPC: G01B11/30 ; G01B11/06 ; B24B37/20

Abstract:
A surface measurement device includes a rotating platform, a motion lever, a measuring module and a control module. The rotating platform rotates an object at a rotating speed. The motion lever is above the rotating platform. The measuring module moves to a variety of measuring positions on the motion lever. When the measuring module is at one of the measuring positions, the measuring module measures the heights of a plurality of sampling points on the surface of the object in a sampling frequency. The control module selectively modifies the rotating speed of the rotating platform or the sampling frequency of the measuring module according to the measuring position of the measuring module to make the distance between the sampling points in at least a region of the surface of the object match a sampling rule.
Public/Granted literature
- US20170059311A1 SURFACE MEASUREMENT DEVICE AND METHOD THEREOF Public/Granted day:2017-03-02
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