- 专利标题： Method of manufacturing mask assembly using electroforming and laser processes and method of manufacturing display apparatus using mask assembly
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申请号： US15196055申请日： 2016-06-29
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公开(公告)号： US09972810B2公开(公告)日： 2018-05-15
- 发明人: Youngmin Moon , Sungsoon Im , Kyuhwan Hwang , Minho Moon
- 申请人： Samsung Display Co., Ltd.
- 申请人地址： KR Yongin-si
- 专利权人： Samsung Display Co., Ltd.
- 当前专利权人： Samsung Display Co., Ltd.
- 当前专利权人地址： KR Yongin-si
- 代理机构： H.C. Park & Associates, PLC
- 优先权： KR10-2015-0172653 20151204
- 主分类号： H01L21/00
- IPC分类号： H01L21/00 ; H01L51/56 ; B23K26/382 ; C25D1/10 ; C25D1/20 ; G03F7/20 ; H01L51/00 ; B23K101/36
摘要：
A method of manufacturing a mask assembly includes forming, via an electroforming process, a base material including at least one opening on an electrode plate; and reprocessing the at least one opening using a laser to form at least one reprocessed opening.
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