Invention Grant
- Patent Title: Cobalt based interconnects and methods of fabrication thereof
-
Application No.: US14137526Application Date: 2013-12-20
-
Publication No.: US09997457B2Publication Date: 2018-06-12
- Inventor: Christopher J. Jezewski , Tejaswi K. Indukuri , Ramanan V. Chebiam , Colin T. Carver
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01L29/40
- IPC: H01L29/40 ; H01L23/532 ; H01L21/768 ; H01L23/522 ; H01L29/49 ; H01L29/78

Abstract:
An embodiment includes a metal interconnect structure, comprising: a dielectric layer disposed on a substrate; an opening in the dielectric layer, wherein the opening has sidewalls and exposes a conductive region of at least one of the substrate and an interconnect line; an adhesive layer, comprising manganese, disposed over the conductive region and on the sidewalls; and a fill material, comprising cobalt, within the opening and on a surface of the adhesion layer. Other embodiments are described herein.
Public/Granted literature
- US20150179579A1 COBALT BASED INTERCONNECTS AND METHODS OF FABRICATION THEREOF Public/Granted day:2015-06-25
Information query
IPC分类: