• 专利标题: Instrument for holding boats for thermal treatment of semiconductor wafers
  • 申请号: US301993
    申请日: 1989-01-25
  • 公开(公告)号: USD324057S
    公开(公告)日: 1992-02-18
  • 设计人: Katsumi IshiiAtsushi Wada
  • 申请人: Katsumi IshiiAtsushi Wada
  • 申请人地址: JPX Kanagawa
  • 专利权人: Tel Sagami Limited
  • 当前专利权人: Tel Sagami Limited
  • 当前专利权人地址: JPX Kanagawa
  • 优先权: JPX1-29833 19880725
Instrument for holding boats for thermal treatment of semiconductor
wafers
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