- 专利标题: Sputtering chamber coil
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申请号: US29090631申请日: 1998-07-13
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公开(公告)号: USD440582S1公开(公告)日: 2001-04-17
- 设计人: Praburam Gopalraja , Zheng Xu , Michael Rosenstein , John C. Forster , Peijun Ding
- 申请人: Praburam Gopalraja , Zheng Xu , Michael Rosenstein , John C. Forster , Peijun Ding