- 专利标题: Piezoactuator and drive circuit therefor
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申请号: US11591409申请日: 2006-11-01
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公开(公告)号: USRE40709E1公开(公告)日: 2009-05-12
- 发明人: Hidehiro Akahane , Akihiro Sawada , Makoto Furuhata
- 申请人: Hidehiro Akahane , Akihiro Sawada , Makoto Furuhata
- 申请人地址: JP Tokyo
- 专利权人: Seiko Epson Corporation
- 当前专利权人: Seiko Epson Corporation
- 当前专利权人地址: JP Tokyo
- 代理商 Michael T. Gabrik
- 优先权: JP2001-91112 20010327
- 主分类号: H01L41/08
- IPC分类号: H01L41/08
摘要:
A piezoactuator has a diaphragm, and the diaphragm has flat piezoelectric elements that oscillate in a longitudinal oscillation mode and a sinusoidal oscillation mode. A first electrode for detecting oscillation in the longitudinal oscillation mode, and a second electrode for detecting the amplitude of oscillation in the sinusoidal oscillation mode, are disposed on the surface of the diaphragm. When the piezoactuator is driven with a drive signal, the phase difference of a first detection signal output from the first electrode and a second detection signal output from the second electrode is detected. The frequency at which the detected phase difference becomes the maximum phase difference is then obtained, and a drive signal of a matching frequency is applied to the piezoelectric elements.