再颁专利
- 专利标题: Wavemeter for gas discharge laser
- 专利标题(中): 气体放电激光波长计
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申请号: US11091005申请日: 2005-03-25
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公开(公告)号: USRE41457E1公开(公告)日: 2010-07-27
- 发明人: Peter C. Newman , John T. Melchior , Richard L. Sandstrom
- 申请人: Peter C. Newman , John T. Melchior , Richard L. Sandstrom
- 申请人地址: US CA San Diego
- 专利权人: Cymer, Inc.
- 当前专利权人: Cymer, Inc.
- 当前专利权人地址: US CA San Diego
- 主分类号: H01S3/13
- IPC分类号: H01S3/13 ; H01S3/08
摘要:
An optical configuration to illuminate an etalon in a laser wavemeter with a minimum level of light intensity. The system includes optical components to direct a portion of the laser output beam representing the entire cross section of the beam, through an etalon positioned in an etalon housing and onto a photodetector. A first lens condenses the size of the beam sample, and a second lens re-collimates the beam which then passes into the etalon housing, ensuring that all of the spatial components of the beam are adequately sampled. A diffractive diffusing element is incorporated into the optical path. In a preferred embodiment, the diffractive diffusing element is placed within the etalon housing between said plano-concave lens and the etalon. In another preferred embodiment, the diffusing element is located up stream but outside the housing in the optical path.
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