Invention Application
- Patent Title: LASER OSCILLATOR
- Patent Title (中): 激光振荡器
-
Application No.: PCT/JP1988000425Application Date: 1988-04-28
-
Publication No.: WO1988008629A1Publication Date: 1988-11-03
- Inventor: FANUC LTD
- Applicant: FANUC LTD , KARUBE, Norio , EGAWA, Akira , YAMAZAKI, Etsuo , IEHISA, Nobuaki , MANABE, Mitsuo
- Assignee: FANUC LTD,KARUBE, Norio,EGAWA, Akira,YAMAZAKI, Etsuo,IEHISA, Nobuaki,MANABE, Mitsuo
- Current Assignee: FANUC LTD,KARUBE, Norio,EGAWA, Akira,YAMAZAKI, Etsuo,IEHISA, Nobuaki,MANABE, Mitsuo
- Priority: JP62/107826 19870430
- Main IPC: H01S03/097
- IPC: H01S03/097
Abstract:
A laser oscillator which establishes r-f discharge by applying an r-f voltage to a plurality of discharge regions via a dielectric member in order to realize laser oscillation. The laser oscillator consists of a DC power source (16) and r-f power sources (18, 19, 20, 21) that convert a DC voltage into an r-f voltage. The DC power source (16) and the r-f power sources (18, 19, 20, 21) are coupled together via a filter (30). The filter (30) prevents r-f components from being fed back from the r-f power sources (18, 19, 20, 21), thus keeping the laser oscillator from unstable operation due to parasitic oscillation. Means is further provided to prevent interference between the r-f power sources and the DC power source.
Information query