Invention Application
- Patent Title: SILICON CHIP FOR USE IN A FORCE-DETECTION SENSOR
- Patent Title (中): 用于强力检测传感器的硅芯片
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Application No.: PCT/DE1992000870Application Date: 1992-10-16
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Publication No.: WO1993010430A1Publication Date: 1993-05-27
- Inventor: ROBERT BOSCH GMBH
- Applicant: ROBERT BOSCH GMBH , HERDEN, Werner , MAREK, Jiri , WEIBLEN, Kurt , BANTIEN, Frank , KUESELL, Matthias , SCHMIDT, Steffen
- Assignee: ROBERT BOSCH GMBH,HERDEN, Werner,MAREK, Jiri,WEIBLEN, Kurt,BANTIEN, Frank,KUESELL, Matthias,SCHMIDT, Steffen
- Current Assignee: ROBERT BOSCH GMBH,HERDEN, Werner,MAREK, Jiri,WEIBLEN, Kurt,BANTIEN, Frank,KUESELL, Matthias,SCHMIDT, Steffen
- Priority: DEP 19911115
- Main IPC: G01L09/06
- IPC: G01L09/06
Abstract:
Proposed is a silicon chip for use in a force-detection sensor. The chip has circuits (22), piezo-resistive elements (21), an intermediate element (36) and a force-application zone (23). The chip (20) is mounted on a support (38). The piezo-resistive elements (21) are disposed in a zone of high mechanical stress and the circuits (22) in a zone of low mechanical stress. The stress distribution within the chip (20) is modified by, for instance, grooves (122) in the chip.
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