Invention Application
- Patent Title: IMPROVED NON-DESTRUCTIVELY READ FERROELECTRIC MEMORY CELL
- Patent Title (中): 改进的非破坏性阅读电磁记忆体
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Application No.: PCT/US1996003128Application Date: 1996-03-09
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Publication No.: WO1996029742A1Publication Date: 1996-09-26
- Inventor: RADIANT TECHNOLOGIES, INC. , EVANS, Joseph, Tate, Jr. , WARREN, William, L. , TUTTLE, Bruce, A.
- Applicant: RADIANT TECHNOLOGIES, INC.
- Assignee: RADIANT TECHNOLOGIES, INC.
- Current Assignee: RADIANT TECHNOLOGIES, INC.
- Priority: US8/406,386 19950317
- Main IPC: H01L29/78
- IPC: H01L29/78
Abstract:
An improved ferroelectric FET structure (10) in which the ferroelectric layer (14) is doped to reduce retention loss. A ferroelectric FET according to the present invention includes a semiconductor layer (16) having first and second contacts (18, 19) thereon, the first and second contacts being separated from one another. The ferroelectric FET also includes a bottom electrode (12) and a ferroelectric layer (14) which is sandwiched between the semiconductor layer (16) and the bottom electrode (12). The ferroelectric layer (14) is constructed from a perovskite structure of the chemical composition ABO3 wherein the B site comprises first and second elements and a dopant element that has an oxidation state greater than +4 in sufficient concentration to impede shifts in the resistance measured between the first and second contacts with time. The ferroelectric FET structure preferably comprises Pb in the A-site. The first and second elements are preferably Zr and Ti, respectively. The preferred B-site dopants are Niobium, Tantalum, and Tungsten at concentration between 1 % and 8 %.
Information query
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