Invention Application
- Patent Title: COPPER ELECTROLESS DEPOSITION ON A TITANIUM-CONTAINING SURFACE
- Patent Title (中): 在含钛表面上的铜化学沉积
-
Application No.: PCT/US9817276Application Date: 1998-08-20
-
Publication No.: WO9910916A3Publication Date: 1999-08-05
- Inventor: ROBINSON KARL , TAYLOR TED
- Applicant: MICRON TECHNOLOGY INC
- Assignee: MICRON TECHNOLOGY INC
- Current Assignee: MICRON TECHNOLOGY INC
- Priority: US91621997 1997-08-22
- Main IPC: C23C18/18
- IPC: C23C18/18 ; C23C18/40 ; H01L21/288 ; H01L21/3205 ; H01L21/768 ; H01L23/52 ; C23C18/16
Abstract:
A method for depositing copper on a titanium-containing surface of a substrate is provided. The method includes forming a patterned catalyst material on the substrate, such that the titanium-containing surface is exposed in selected regions. The catalyst material has an oxidation half-reaction potential having a magnitude that is greater than a magnitude of a reduction half-reaction potential of titanium dioxide. Copper is then deposited from an electroless solution onto the exposed regions of the titanium-containing surface.
Information query
IPC分类: