Invention Application
WO9910916A3 COPPER ELECTROLESS DEPOSITION ON A TITANIUM-CONTAINING SURFACE 审中-公开
在含钛表面上的铜化学沉积

COPPER ELECTROLESS DEPOSITION ON A TITANIUM-CONTAINING SURFACE
Abstract:
A method for depositing copper on a titanium-containing surface of a substrate is provided. The method includes forming a patterned catalyst material on the substrate, such that the titanium-containing surface is exposed in selected regions. The catalyst material has an oxidation half-reaction potential having a magnitude that is greater than a magnitude of a reduction half-reaction potential of titanium dioxide. Copper is then deposited from an electroless solution onto the exposed regions of the titanium-containing surface.
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