Invention Application
WO0040779A8 METHOD, CHEMISTRY, AND APPARATUS FOR HIGH DEPOSITION RATE SOLDER ELECTROPLATING ON A MICROELECTRONIC WORKPIECE
审中-公开
方法,化学和设备在微电子工件上的高沉积速率焊接电镀
- Patent Title: METHOD, CHEMISTRY, AND APPARATUS FOR HIGH DEPOSITION RATE SOLDER ELECTROPLATING ON A MICROELECTRONIC WORKPIECE
- Patent Title (中): 方法,化学和设备在微电子工件上的高沉积速率焊接电镀
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Application No.: PCT/US9915850Application Date: 1999-07-12
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Publication No.: WO0040779A8Publication Date: 2001-02-22
- Inventor: BATZ ROBERT W , CONRADY SCOT , RITZDORF THOMAS L
- Applicant: SEMITOOL INC , BATZ ROBERT W , CONRADY SCOT , RITZDORF THOMAS L
- Assignee: SEMITOOL INC,BATZ ROBERT W,CONRADY SCOT,RITZDORF THOMAS L
- Current Assignee: SEMITOOL INC,BATZ ROBERT W,CONRADY SCOT,RITZDORF THOMAS L
- Priority: US11445098 1998-12-31
- Main IPC: C25D7/12
- IPC: C25D7/12 ; C25B9/00 ; C25B11/04 ; C25D17/00 ; H01B1/06
Abstract:
The invention is directed to an electroplating apparatus for selectively depositing tin/lead solder bumps at a high deposition rate. The apparatus comprises a reactor bowl (35) containing an electroplating solution having free ions of tin and lead for plating onto a workpiece (25). A chemical delivery system is used to deliver the electroplating solution to the reactor bowl at a high flow rate. A workpiece support includes a contact assembly (85) for providing electroplating power to a surface at a side of the workpiece that is to be plated. The assembly contacts the workpiece at a large plurality of discrete flexure contacts (90) that are isolated from exposure to the electroplating solution. An anode (55) is spaced from the workpiece support within the reactor assembly (20) and is in contact with the electroplating solution. The electroplating solution comprises a concentration of a lead compound, a concentration of a tin compound, water and methane sulfonic acid.
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