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Invention Application
WO01011665A1 OPTICAL DEVICE FOR ILLUMINATION, EXPOSURE DEVICE, CONTAINER OF OPTICAL PART, METHOD OF ASSEMBLING EXPOSURE DEVICE, METHOD OF EVALUATING MATERIAL, AND METHOD AND DEVICE FOR EVALUATING FILTER 审中-公开
用于照明的光学装置，曝光装置，光学部件容器，组装曝光装置的方法，评估材料的方法以及用于评估过滤器的方法和装置

  • Patent Title: OPTICAL DEVICE FOR ILLUMINATION, EXPOSURE DEVICE, CONTAINER OF OPTICAL PART, METHOD OF ASSEMBLING EXPOSURE DEVICE, METHOD OF EVALUATING MATERIAL, AND METHOD AND DEVICE FOR EVALUATING FILTER
  • Patent Title (English): Optical device for illumination, exposure device, container of optical part, method of assembling exposure device, method of evaluating material, and method and device for evaluating filter
  • Patent Title (中): 用于照明的光学装置，曝光装置，光学部件容器，组装曝光装置的方法，评估材料的方法以及用于评估过滤器的方法和装置
  • Application No.: PCT/JP2000/005245
    Application Date: 2000-08-04
  • Publication No.: WO01011665A1
    Publication Date: 2001-02-15
  • Main IPC: G03F7/20
  • IPC: G03F7/20 ;  H01L21/027
OPTICAL DEVICE FOR ILLUMINATION, EXPOSURE DEVICE, CONTAINER OF OPTICAL PART, METHOD OF ASSEMBLING EXPOSURE DEVICE, METHOD OF EVALUATING MATERIAL, AND METHOD AND DEVICE FOR EVALUATING FILTER
Abstract:
An optical device for illumination includes a first space (SP1) surrounding an optical path of an energy beam for irradiating an object, a second space (SP2) surrounding the first space (SP1), and a third space (SP3) surrounding the second space (SP2). The first to third spaces (SP1, SP2, SP3) are controlled to have different target doping concentrations. A source of contamination such as an actuator can thus be isolated to maintain the space surrounding the optical path chemically clean.
Abstract(Chinese):

用于照明的光学装置包括围绕用于照射物体的能量束的光路的第一空间（SP1），围绕第一空间（SP1）的第二空间（SP2）和围绕第二空间的第三空间（SP3） （SP2）。 第一至第三空间（SP1，SP2，SP3）被控制为具有不同的目标掺杂浓度。 因此可以隔离诸如致动器的污染源，以保持光路周围的空间化学清洁。

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