Invention Application
- Patent Title: CERAMIC HEATER
- Patent Title (English): Ceramic heater
- Patent Title (中): 陶瓷加热器
-
Application No.: PCT/JP2000/005156Application Date: 2000-08-01
-
Publication No.: WO01011923A1Publication Date: 2001-02-15
- Main IPC: H05B3/20
- IPC: H05B3/20 ; H01L21/00 ; H01L21/027 ; H05B3/10 ; H05B3/14 ; H05B3/16 ; H05B3/26 ; H05B3/28 ; H05B3/68 ; H05B3/74 ; H01L21/30 ; H05B3/56
Abstract:
The invention provides a ceramic heater that makes the temperature of a ceramic substrate uniform by suppressing the transfer of heat from the ceramic heater to a housing. The ceramic heater includes a heater formed on or under the surface of a ceramic substrate, and the surface roughness on the side of the ceramic substrate is JIS B 0601 Rmax=0.1-200 mu m.
Information query
