Invention Application
WO0128950A9 A METHOD AND APPARATUS FOR TREATING A SUBSTRATE WITH AN OZONE-SOLVENT SOLUTION
审中-公开
一种用臭氧溶剂处理基材的方法和装置
- Patent Title: A METHOD AND APPARATUS FOR TREATING A SUBSTRATE WITH AN OZONE-SOLVENT SOLUTION
- Patent Title (中): 一种用臭氧溶剂处理基材的方法和装置
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Application No.: PCT/US0029167Application Date: 2000-10-19
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Publication No.: WO0128950A9Publication Date: 2002-05-10
- Inventor: BOYERS DAVID G , CREMER JAY THEODORE JR
- Applicant: PHIFER SMITH CORP
- Assignee: PHIFER SMITH CORP
- Current Assignee: PHIFER SMITH CORP
- Priority: US16043599 1999-10-19
- Main IPC: B08B7/00
- IPC: B08B7/00 ; B08B3/02 ; B08B3/08 ; C03C23/00 ; G03F7/42 ; H01L21/00 ; H01L21/304 ; H01L21/311 ; H01L21/3213 ; B08B3/00 ; B08B3/10 ; B08B3/14 ; B08B9/00 ; B08B9/20 ; C23G1/00 ; C23G1/02 ; F23J1/00
Abstract:
A general method and apparatus for treating materials comprising the steps of dissolving ozone gas in a solvent at a predetermined temperature T1 to form an ozone solvent solution produced by the ozonated water supply (22), heating the ozone solvent solution by a heat exchanger (28) to a second predetermined temperature T2 which is greater than T1, and directing the flow of the ozone solvent solution to a dispensing nozzle (36) for treatment of the material (38).
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