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Invention Application
WO01043155A1 HOLLOW ELECTRODE FOR PLASMA GENERATION 审中-公开
用于等离子体生成的中空电极

  • Patent Title: HOLLOW ELECTRODE FOR PLASMA GENERATION
  • Patent Title (中): 用于等离子体生成的中空电极
  • Application No.: PCT/US2000/033486
    Application Date: 2000-12-07
  • Publication No.: WO01043155A1
    Publication Date: 2001-06-14
  • Main IPC: H01J37/32
  • IPC: H01J37/32 ;  H01J1/02 ;  H01J7/24 ;  H01J61/52 ;  H01K1/58
HOLLOW ELECTRODE FOR PLASMA GENERATION
Abstract:
A hollow electrode (1) for plasma generation having an inverted conical protrusion (3) on the inner surface of the tip thereof. The cooling fluid (6) is directed against the interior surface of the conical protrusion (3) by a coolant-carrying tube (4) interior to the electrode (1) and approximately coaxial therewith.
Abstract(Chinese):

一种用于等离子体产生的中空电极（1），其顶端的内表面上具有倒锥形突起（3）。 冷却流体（6）通过位于电极（1）内部的大致同轴的冷却剂供给管（4）引导到锥形突起（3）的内表面。

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