Invention Application
- Patent Title: TWO-DIMENSIONAL MICRO-MIRROR ARRAY ENHANCEMENTS
- Patent Title (中): 二维微镜阵列增强
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Application No.: PCT/US0105309Application Date: 2001-02-16
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Publication No.: WO0161400A3Publication Date: 2003-07-10
- Inventor: SLATER TIMOTHY G , NEUKERMANS ARMAND P , BAJIKAR SATEESH S , DOWNING JAMES P , SCHUMAN MARC R , CALMES SAM , ROMANSOVSKY ALEXANDER B , GREEN JOHN
- Applicant: XROS INC NORTEL NETWORKS , SLATER TIMOTHY G , NEUKERMANS ARMAND P , BAJIKAR SATEESH S , DOWNING JAMES P , SCHUMAN MARC R , CALMES SAM , ROMANSOVSKY ALEXANDER B , GREEN JOHN
- Assignee: XROS INC NORTEL NETWORKS,SLATER TIMOTHY G,NEUKERMANS ARMAND P,BAJIKAR SATEESH S,DOWNING JAMES P,SCHUMAN MARC R,CALMES SAM,ROMANSOVSKY ALEXANDER B,GREEN JOHN
- Current Assignee: XROS INC NORTEL NETWORKS,SLATER TIMOTHY G,NEUKERMANS ARMAND P,BAJIKAR SATEESH S,DOWNING JAMES P,SCHUMAN MARC R,CALMES SAM,ROMANSOVSKY ALEXANDER B,GREEN JOHN
- Priority: US18324600 2000-02-17; US20361700 2000-05-11; US18311700 2000-02-17; US71594500 2000-11-16; US20775200 2000-05-30
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G02B26/02
Abstract:
A micro-mirror strip assembly having a plurality of two-dimensional micro-mirror structures with improved deflection and other characteristics is presented. In the micro-mirror structures, electrodes for electrostatic deflection are disposed on conical or quasi-conical entities that are machined, attached or molded into a substrate. Torsion sensors (244) are provided along the axes of rotation to control deflection of the quadrant deflection electrodes. The shielded sensor structure (240) includes a silicon layer (241), an insulating layer (242) and a metal layer (243). The structure further includes a sensor implant resistor (244) in the silicon layer (241) and a shield (245) that is applied over the sensor implant resistor (244) to stabilise sensor output and eliminate light sensitivity.
Public/Granted literature
- WO0161400A9 TWO-DIMENSIONAL MICRO-MIRROR ARRAY ENHANCEMENTS Public/Granted day:2002-10-10
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