Invention Application
WO2003044598A1 COMPENSATING FOR EFFECTS OF VARIATIONS IN GAS REFRACTIVITY IN INTERFEROMETERS
审中-公开
补偿变量在干扰计中气体反射率的变化
- Patent Title: COMPENSATING FOR EFFECTS OF VARIATIONS IN GAS REFRACTIVITY IN INTERFEROMETERS
- Patent Title (中): 补偿变量在干扰计中气体反射率的变化
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Application No.: PCT/US2002/036746Application Date: 2002-11-15
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Publication No.: WO2003044598A1Publication Date: 2003-05-30
- Inventor: HILL, Henry, A.
- Applicant: ZYGO CORPORATION , HILL, Henry, A.
- Applicant Address: 21 Laurel Brook Road, Midlefield, CT 06455-0448 US
- Assignee: ZYGO CORPORATION,HILL, Henry, A.
- Current Assignee: ZYGO CORPORATION,HILL, Henry, A.
- Current Assignee Address: 21 Laurel Brook Road, Midlefield, CT 06455-0448 US
- Agency: FEIGENBAUM, David, L.
- Priority: US60/335,963 20011115; US10/294,158 20021114
- Main IPC: G03B27/58
- IPC: G03B27/58
Abstract:
Methods and system for compensating for effects of changes and variations of gas refractivity in a measurment and/or reference beam path of an interferometer are disclosed.
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