发明申请
- 专利标题： METHOD OF MAKING SILICA-TITANIA EXTREME ULTRAVIOLET ELEMENTS
- 专利标题（中）： 制备二氧化硅 - 钛铁超极本元素的方法
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申请号： PCT/US0306809申请日： 2003-03-04
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公开(公告)号： WO03076352A2公开(公告)日： 2003-09-18
- 发明人: DAVIS JR CLAUDE L , BOWDEN BRADLEY F , WIGHT JR JOHN F , WASILEWSKI MICHAEL H , HRDINA KENNETH E , BARRETT W TIMOTHY , ROBINSON MICHAEL
- 申请人： CORNING INC
- 专利权人： CORNING INC
- 当前专利权人： CORNING INC
- 优先权： US36205302 2002-03-05
- 主分类号： G21K1/06
- IPC分类号： G21K1/06 ; C03B8/04 ; C03B19/01 ; C03B20/00 ; C03B32/00 ; C03C3/06 ; C03C4/00 ; H01L21/027 ; C03B
摘要：
Methods and apparatus for manufacturing titania-containing fused silica bodies are disclosed. The titania-containing fused silica bodies are subsequently processed to make extreme ultraviolet soft x-ray masks. The methods and apparatus involve providing powders external to a furnace cavity and depositing the powders in the furnace cavity to form a titania-containing fused silica body.
