Invention Application
- Patent Title: MULTILAYER SUBSTRATE METALLIZATION FOR IC INTERCONNECTION
- Patent Title (中): 用于IC互连的多层基板金属化
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Application No.: PCT/SG0300154Application Date: 2003-06-26
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Publication No.: WO2004004003A8Publication Date: 2004-04-15
- Inventor: ZHANG FAN , LI MING
- Applicant: INST MATERIALS RESEARCH & ENG , ZHANG FAN , LI MING
- Assignee: INST MATERIALS RESEARCH & ENG,ZHANG FAN,LI MING
- Current Assignee: INST MATERIALS RESEARCH & ENG,ZHANG FAN,LI MING
- Priority: SG200203893 2002-06-27
- Main IPC: H01L21/60
- IPC: H01L21/60 ; H01L23/498 ; H01L23/485 ; H01L21/44
Abstract:
A substrate metallization for soldering, with a Pb-free solder or a eutectic SnPb solder (4), to a thin film under-bump-metallization (UBM) of a Si die, comprising: a substrate (1), a layer of Cu (20) formed on a portion of the substrate (1), a layer of Ni (21) formed on the Cu layer (20), an oxidation protection layer (22), and a Ni-barrier layer (23), between the Ni layer (21)and the oxidation protection layer (22), adapted to inhibit diffusion of Ni from the Ni layer (21) to the solder (4) during a reflow process or during high temperature storage.
Information query
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