Invention Application
WO2004082014A1 VISION SYSTEM AND METHOD FOR CALIBRATING A WAFER CARRYING ROBOT
审中-公开
用于校准携带机器人的波浪的视觉系统和方法
- Patent Title: VISION SYSTEM AND METHOD FOR CALIBRATING A WAFER CARRYING ROBOT
- Patent Title (中): 用于校准携带机器人的波浪的视觉系统和方法
-
Application No.: PCT/US2004/007202Application Date: 2004-03-09
-
Publication No.: WO2004082014A1Publication Date: 2004-09-23
- Inventor: SADIGHI, Iraj , HUDGENS, Jeff , RICE, Michael , WYKA, Gary
- Applicant: APPLIED MATERIALS, INC. , SADIGHI, Iraj , HUDGENS, Jeff , RICE, Michael , WYKA, Gary
- Applicant Address: 3050 Bowers Avenue, Santa Clara, CA 95054 US
- Assignee: APPLIED MATERIALS, INC.,SADIGHI, Iraj,HUDGENS, Jeff,RICE, Michael,WYKA, Gary
- Current Assignee: APPLIED MATERIALS, INC.,SADIGHI, Iraj,HUDGENS, Jeff,RICE, Michael,WYKA, Gary
- Current Assignee Address: 3050 Bowers Avenue, Santa Clara, CA 95054 US
- Agency: PATTERSON, B., Todd
- Priority: US10/387,267 20030311
- Main IPC: H01L21/68
- IPC: H01L21/68
Abstract:
A vision system and method for calibrating motion of a robot disposed in a processing system is provided. In one embodiment, a vision system for a processing system includes a camera and a calibration wafer that are positioned in a processing system. The camera is positioned on the robot and is adapted to obtain image data of the calibration wafer disposed in a predefined location within the processing system. The image data is utilized to calibrate the robots motion.
Information query
IPC分类:
