Invention Application
- Patent Title: PHOTOCHROMIC SUBSTRATE CONTAINER
- Patent Title (中): 光致变色基板容器
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Application No.: PCT/US2004/035217Application Date: 2004-10-25
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Publication No.: WO2005040011A1Publication Date: 2005-05-06
- Inventor: BURNS, John , FULLER, Matthew, A. , KING, Jeffrey, J. , FORBES, Martin, L. , SMITH, Mark, V.
- Applicant: ENTEGRIS, INC. , BURNS, John , FULLER, Matthew, A. , KING, Jeffrey, J. , FORBES, Martin, L. , SMITH, Mark, V.
- Applicant Address: 3500 Lyman Boulevard, Chaska, MN 55318 US
- Assignee: ENTEGRIS, INC.,BURNS, John,FULLER, Matthew, A.,KING, Jeffrey, J.,FORBES, Martin, L.,SMITH, Mark, V.
- Current Assignee: ENTEGRIS, INC.,BURNS, John,FULLER, Matthew, A.,KING, Jeffrey, J.,FORBES, Martin, L.,SMITH, Mark, V.
- Current Assignee Address: 3500 Lyman Boulevard, Chaska, MN 55318 US
- Agency: CHRISTENSEN, Douglas, J.
- Priority: US60/514,164 20031024; US10/971,556 20041022
- Main IPC: B65D85/00
- IPC: B65D85/00
Abstract:
A semiconductor wafer, substrate, or reticle storage or shipping container (10, 24) that includes a photochromic indicator of exposure to undesired electromagnetic radiation. A photochromic material is incorporated into the plastic used to fabricate at least a portion of the container. The photochromic material may change color or darkness in response to exposure to a selected range of wavelengths of light.
Information query
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