Invention Application
- Patent Title: WAFER CONTAINER WITH DOOR ACTUATED WAFER RESTRAINT
- Patent Title (中): 带门启动的水龙头限位器
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Application No.: PCT/US2004/038452Application Date: 2004-11-16
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Publication No.: WO2005055279A2Publication Date: 2005-06-16
- Inventor: BURNS, John , FULLER, Matthew, A. , KING, Jeffery, J. , FORBES, Martin, L. , SMITH, Mark, V.
- Applicant: ENTEGRIS, INC. , BURNS, John , FULLER, Matthew, A. , KING, Jeffery, J. , FORBES, Martin, L. , SMITH, Mark, V.
- Applicant Address: 3500 Lyman Boulevard, Chaska, MN 55318 US
- Assignee: ENTEGRIS, INC.,BURNS, John,FULLER, Matthew, A.,KING, Jeffery, J.,FORBES, Martin, L.,SMITH, Mark, V.
- Current Assignee: ENTEGRIS, INC.,BURNS, John,FULLER, Matthew, A.,KING, Jeffery, J.,FORBES, Martin, L.,SMITH, Mark, V.
- Current Assignee Address: 3500 Lyman Boulevard, Chaska, MN 55318 US
- Agency: CHRISTENSEN, Douglas, J.
- Priority: US60/520,817 20031116; US10/989,232 20041115
- Main IPC: H01L
- IPC: H01L
Abstract:
A container for holding a wafer includes an enclosure portion having a top, a bottom, a pair of opposing sides, a back and an opposing open front defined by a door frame. A door is sealingly engagable in the door frame to close the open front. The container further includes wafer restraint means in the enclosure including fixed wafer restraint means and operable wafer restraint means. The operable wafer restraint means is selectively positionable by engaging and disengaging the door from the door frame, and is positioned so to enable insertion or removal of a wafer from the container when the door is disengaged from the door frame and positioned so as to cooperate with the fixed wafer restraint means to restrain the wafer in the container when the door is engaged in the door frame.
Information query
