Invention Application
- Patent Title: A HIGH REPETITION RATE LASER PRODUCED PLASMA EUV LIGHT SOURCE
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Application No.: PCT/US2005/007056Application Date: 2005-03-03
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Publication No.: WO2005089130A3Publication Date: 2005-09-29
- Inventor: AKINS, Robert, P. , SANDSTROM, Richard, L. , PARTLO, William, N. , FOMENKOV, Igor, V. , STEIGER, Thomas, D. , ALGOTS, Martin, J. , BOWERING, Norbert, R. , JACQUES, Robert, N. , PALENSCHAT, Frederick, A. , SONG, Jun
- Applicant: CYMER, INC. , AKINS, Robert, P. , SANDSTROM, Richard, L. , PARTLO, William, N. , FOMENKOV, Igor, V. , STEIGER, Thomas, D. , ALGOTS, Martin, J. , BOWERING, Norbert, R. , JACQUES, Robert, N. , PALENSCHAT, Frederick, A. , SONG, Jun
- Applicant Address: 17075 Thommint Court, San Diego, CA 92127-2413 US
- Assignee: CYMER, INC.,AKINS, Robert, P.,SANDSTROM, Richard, L.,PARTLO, William, N.,FOMENKOV, Igor, V.,STEIGER, Thomas, D.,ALGOTS, Martin, J.,BOWERING, Norbert, R.,JACQUES, Robert, N.,PALENSCHAT, Frederick, A.,SONG, Jun
- Current Assignee: CYMER, INC.,AKINS, Robert, P.,SANDSTROM, Richard, L.,PARTLO, William, N.,FOMENKOV, Igor, V.,STEIGER, Thomas, D.,ALGOTS, Martin, J.,BOWERING, Norbert, R.,JACQUES, Robert, N.,PALENSCHAT, Frederick, A.,SONG, Jun
- Current Assignee Address: 17075 Thommint Court, San Diego, CA 92127-2413 US
- Agency: CRAY, William, C.
- Priority: US10/803,526 20040317
- Main IPC: H01J35/20
- IPC: H01J35/20
Abstract:
An EUV light source apparatus (20) comprises a pulse laser (22) providing laser pulses (55) at a selected pulse repetition rate focused at a desired target ignition site (28); a target formation system (92) providing discrete targets (94); a target steering system (350) intermediate the target formation system (92) and the ignition site (28); a target tracking system (42) providing information about movement of the target (94) between the target formation system (92) and the target steering system (350); an electrostatic plasma containment apparatus (314) providing an electric plasma confinement field (316) at or near the ignition site (28) at the time of ignition; a vessel (30) having an intermediate wall (282) for passing EUV light; and a magnetic plasma confinement mechanism (329) creating a magnetic field (320) in the vicinity of the ignition site (28).
Information query
