Invention Application
WO2006066135A9 SYSTEM AND METHOD FOR SIGNAL PROCESSING FOR A WORKPIECE SURFACE INSPECTION 审中-公开
用于工件表面检查的信号处理系统和方法

SYSTEM AND METHOD FOR SIGNAL PROCESSING FOR A WORKPIECE SURFACE INSPECTION
Abstract:
A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The signal processing subsystem comprises a series of data acquisition nodes, each dedicated to a collection detection module and a plurality of data reduction nodes, made available on a peer to peer basis to each data acquisition nodes. Improved methods for detecting signal in the presence of noise are also provided.
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