Invention Application
WO2006066135A9 SYSTEM AND METHOD FOR SIGNAL PROCESSING FOR A WORKPIECE SURFACE INSPECTION
审中-公开
用于工件表面检查的信号处理系统和方法
- Patent Title: SYSTEM AND METHOD FOR SIGNAL PROCESSING FOR A WORKPIECE SURFACE INSPECTION
- Patent Title (中): 用于工件表面检查的信号处理系统和方法
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Application No.: PCT/US2005045782Application Date: 2005-12-17
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Publication No.: WO2006066135A9Publication Date: 2006-08-03
- Inventor: ANDREWS SCOTT , JUDELL NEIL , BILLS RICHARD EARL , TIEMEYER TIMOTHY R
- Applicant: ADE CORP
- Assignee: ADE CORP
- Current Assignee: ADE CORP
- Priority: US63852904 2004-12-19
- Main IPC: G01B9/00
- IPC: G01B9/00
Abstract:
A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The signal processing subsystem comprises a series of data acquisition nodes, each dedicated to a collection detection module and a plurality of data reduction nodes, made available on a peer to peer basis to each data acquisition nodes. Improved methods for detecting signal in the presence of noise are also provided.
Public/Granted literature
- WO2006066135A3 SYSTEM AND METHOD FOR SIGNAL PROCESSING FOR A WORKPIECE SURFACE INSPECTION Public/Granted day:2009-04-16
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