Invention Application
WO2006066205A3 SYSTEM AND METHOD FOR INSPECTION OF A WORKPIECE SURFACE USING MULTIPLE SCATTERED LIGHT COLLECTORS
审中-公开
使用多个散焦光收集器检查工件表面的系统和方法
- Patent Title: SYSTEM AND METHOD FOR INSPECTION OF A WORKPIECE SURFACE USING MULTIPLE SCATTERED LIGHT COLLECTORS
- Patent Title (中): 使用多个散焦光收集器检查工件表面的系统和方法
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Application No.: PCT/US2005045929Application Date: 2005-12-17
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Publication No.: WO2006066205A3Publication Date: 2009-04-09
- Inventor: BILLS RICHARD EARL , JUDELL NEIL , TIEMEYER TIMOTHY R , MCNIVEN JAMES PETER
- Applicant: ADE CORP
- Assignee: ADE CORP
- Current Assignee: ADE CORP
- Priority: US63852904 2004-12-19
- Main IPC: G01N21/00
- IPC: G01N21/00
Abstract:
A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. Certain of these components, most notably the beam source subsystem, the beam scanning subsystem and the optical collection and detection subsystem are modular for ready field replacement and/or maintenance. The optical collection and detection system features wing collectors in the front quartersphere and back collectors in the back quartersphere for collected light scattered from the surface of the workpiece. This can greatly improve the measurement capabilities of the system. Also included is a method for detecting asymmetric defects using the wing collectors and back collectors.
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