Invention Application
- Patent Title: METHOD OF MAKING AN APPLICATOR LIQUID FOR ELECTRONICS FABRICATION PROCESS
- Patent Title (中): 电子制造工艺制造涂布液的方法
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Application No.: PCT/US2005/017839Application Date: 2005-05-20
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Publication No.: WO2006078293A2Publication Date: 2006-07-27
- Inventor: SEN, Rahul , SIVARAJAN, Ramesh , RUECKES, Thomas , SEGAL, Brent, M.
- Applicant: NANTERO, INC. , SEN, Rahul , SIVARAJAN, Ramesh , RUECKES, Thomas , SEGAL, Brent, M.
- Applicant Address: 25-D Olympia Avenue, Woburn, MA 01801 US
- Assignee: NANTERO, INC.,SEN, Rahul,SIVARAJAN, Ramesh,RUECKES, Thomas,SEGAL, Brent, M.
- Current Assignee: NANTERO, INC.,SEN, Rahul,SIVARAJAN, Ramesh,RUECKES, Thomas,SEGAL, Brent, M.
- Current Assignee Address: 25-D Olympia Avenue, Woburn, MA 01801 US
- Agency: DICHIARA, Peter, M. et al.
- Priority: US10/860,331 20040603
- Main IPC: C01B31/02
- IPC: C01B31/02
Abstract:
Certain spin-coatable liquids and application techniques are described, which can be used to form nanotube films or fabrics of controlled properties. A method of making an applicator liquid containing nanotubes for use in an electronics fabrication process includes characterizing an electronic fabrication process according to fabrication compatible solvents and allowable levels of metallic and particle impurities; providing nanotubes that satisfy the allowable impurities criteria for the electronics fabrication process; providing a solvent that meets the fabrication compatible solvents and allowable impurities criteria for the electronic fabrication process; and dispersing the nanotubes into the solvent at a concentration of at least one milligram of nanotubes per liter solvent to form an applicator liquid.
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