Invention Application
WO2007005230A3 METHOD FOR REMOVING MATERIAL FROM SEMICONDUCTOR WAFER AND APPARATUS FOR PERFORMING THE SAME
审中-公开
从半导体晶片上去除材料的方法和执行该方法的装置
- Patent Title: METHOD FOR REMOVING MATERIAL FROM SEMICONDUCTOR WAFER AND APPARATUS FOR PERFORMING THE SAME
- Patent Title (中): 从半导体晶片上去除材料的方法和执行该方法的装置
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Application No.: PCT/US2006023354Application Date: 2006-06-15
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Publication No.: WO2007005230A3Publication Date: 2007-04-26
- Inventor: KOROLIK MIKHAIL , RAVKIN MICHAEL , DELARIOS JOHN , REDEKER FRITZ C , BOYD JOHN M
- Applicant: LAM RES CORP , KOROLIK MIKHAIL , RAVKIN MICHAEL , DELARIOS JOHN , REDEKER FRITZ C , BOYD JOHN M
- Assignee: LAM RES CORP,KOROLIK MIKHAIL,RAVKIN MICHAEL,DELARIOS JOHN,REDEKER FRITZ C,BOYD JOHN M
- Current Assignee: LAM RES CORP,KOROLIK MIKHAIL,RAVKIN MICHAEL,DELARIOS JOHN,REDEKER FRITZ C,BOYD JOHN M
- Priority: US17408005 2005-06-30
- Main IPC: H01L21/00
- IPC: H01L21/00 ; C03B33/00 ; H01L21/02 ; H01L21/64 ; H01L21/70
Abstract:
A pressure is maintained within a volume within which a semiconductor wafer resides at a pressure that is sufficient to maintain a liquid state of a precursor fluid to a non-Newtonian fluid. The precursor fluid is disposed proximate to a material to be removed from the semiconductor wafer while maintaining the precursor fluid in the liquid state. The pressure is reduced in the volume within which the semiconductor wafer resides such that the precursor fluid disposed on the wafer within the volume is transformed into the non- Newtonian fluid. An expansion of the precursor fluid and movement of the precursor fluid relative to the wafer during transformation into the non-Newtonian fluid causes theresulting non-Newtonian fluid to remove the material from the semiconductor wafer.
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