Invention Application
WO2007012027A3 SILICON SPOUT-FLUIDIZED BED 审中-公开
硅喷射流化床

SILICON SPOUT-FLUIDIZED BED
Abstract:
Polysilicon is formed by pyrolytic decomposition of a silicon-bearing gas and deposition of silicon onto fluidized silicon particles. Multiple submerged spout fluidized bed reactors (10) and reactors having secondary orifices (20) are disclosed.
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