Invention Application
WO2007031317A2 METHOD FOR APPLYING A POROUS GLASS LAYER 审中-公开
涂布多孔玻璃层的方法

METHOD FOR APPLYING A POROUS GLASS LAYER
Abstract:
The invention relates to a method for applying a porous glass layer. According to the invention, a porous glass layer is to be applied according to a PVD-method. The degree of porosity and average pore size can vary according to the process parameters, such as pressure and precipitation rate and by targeted addition of foreign bodies.
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